Integrated niobium thin film air bridges as variable capacitors for superconducting GHz electronic circuits

Pentacene integrated thin-film transistors and circuits

Comparison of Paraelectric and Ferroelectric Materials for Applications as Dielectrics in Thin Film Integrated Capacitors

Ferroelectrics such as BaTiO3, PbxZr1-xTiO3 and BaxSr1-xTiO3 can exhibit dielectric constants up to three orders of magnitude higher than those of paraelectric materials such as SiO2, Al2O3, Ta2O5, and BCB. However, the dielectric properties of ferroelectrics are typically a stronger function of temperature, frequency, film thickness, and bias resulting in significant nonlinearities in their pe...

Thin film wavelength converters for photonic integrated circuits

Quasi-phase-matched (QPM) wavelength converters are highly desirable for emerging nonlinear optics applications in photonic integrated circuits, but available waveguide and quasi-phase-matching technologies have so far constrained their realization. In this work, we present a periodically poled lithium niobate (LN) waveguide on a silicon nitride– thin film LN platform. It contains a submicromet...

THE THIN FILM CAPACITORS WITH AlN DIELECTRIC

The work is focused on thin film technologies especially on sputtering of dielectric thin film layers. The set of thin film capacitors was created on silica glass substrate. Aluminum electrodes of separated capacitors are deposited by method of vacuum evaporation. The AlN dielectric layer was prepared by reactive high frequency sputtering from aluminum target in nitrogen atmosphere. Dielectric ...

FABRICATION AND MODELING OF PASSIVE COMPONENTS FOR InP-BASED MMICs

Passive components for use in planar Monolithic Microwave Integrated Circuits (MMICs) based on High Electron Mobility Transistors (HEMTs) on indium phosphide substrates are presented. Design, fabrication, and modeling issues of capacitors, resistors, inductors, transmission lines, via holes, and air bridges have been addressed. Sputtered thin films have been utilized to make metal-insulator-met...